Download PDFOpen PDF in browserDesign, Modelling, Fabrication and Studying the Responses of the SAW Devices for Temperature MeasurementEasyChair Preprint 897017 pages•Date: October 3, 2022AbstractIn this paper, a complete analysis of a surface acoustic wave (SAW) sensor is reported with the capability of temperature sensing. An inexpensive material polydimethylsiloxane (PDMS) is used in temperature sensing. This SAW sensor is coated with PDMS solution to increase the sensitivity of the SAW temperature sensor. This PDMS solution is very sensitive towards the temperature. PDMS is positive coefficient of elasticity. Permittivity of this material is decreases with temperature. The permittivity change is based on the principle of clausius-Mosotti equation. That is density of sensing layer is decreases with temperature. Hence the capacitance formed is changed to decrease with temperature. As a result frequency increases with temperature. Simulation of the equivalent model of temperature sensor is done through TINA software. We have taken all initial electrical equivalent parameters of R02101 in T039 case as given by the manufacturer. Sensor is tested from 250C to 750C temperature and observed a good sensitivity of 860 KHz/0C shift Keyphrases: PDMS, SAW sensor, Surface acoustic wave, Temperature sensor
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